日本 오시가네

모델 SC-200

모델 SC-300

모델 SC-308

모델 SC-408

모델 SC-508

동아

日本 미카사

모델 1H-D7

모델l 1H-DX2

모델l 1H-306S

모델 1H-306S(디스펜서)

모델 1H-700C

日本 교와리겐

모델 359 S1

모델 359 SD1

모델 359 SD2

모델 359 SD3

 日本 교와리켄

마스크 얼라이너 

       K-307PS95

     K-309PW95

日本 교와리켄

마이크로 프로브

日本 교와리겐

스크라이버

PS Motor: Up to 10,000 rpm, for relatively light loads such as silicon wafers, small photomasks, etc.

R790 Bowl: 7.9-inch I.D., reduced by a removable splash deflector to a maximum recommended substrate dimension of 5 inches. For a 5-inch diameter or diagonal substrate, the accessory substrate lifter/loader is recommended because of the limited clearance between the substrate and splash deflector during loading and unloading. Larger substrates may be handled by removing the splash deflector but undesirable backsplash or splatter from the bowl may be the result. Headway recommends the next larger bowl, the CB15, for larger than 5" maximum dimension substrates.

The R790 motor package has two drain lines from the stainless steel bowl. The bowl is surrounded by a rectangular stainless steel plenum with an air exhaust port for pulling air down through the bowl and out of the lab environment. The air exhaust rate becomes a part of the spin coating process, and in critical coating applications, should be monitored and regulated. A port on the exhaust tube provides for attaching a Magnehelic (or other) sensor for visual or automatic monitoring of the air exhaust status. For closed-chamber inhibited drying spin coating (see HRI Technical Note H-18-93 on IDS), an accessory exhaust damper and bowl cover is available. With the bowl covered during coating, the PWM32 controller can be programmed to close the accessory exhaust damper during a process.

An accessory substrate lifter and alignment tool is available for the R790 package. A lifter rod working through the motor shaft will lift a substrate out of the bowl. When loading, the substrate is placed on an alignment platform, the lifter lifts the substrate out of the alignment platform and the operator rotates the platform away from above the bowl. The lifter lowers the substrate onto the chuck, properly centered. This accessory eliminates the tedious manual process of reaching into the bowl to load and unload substrates and the problem of visual centering and contamination.

The R790 motor package can be dropped into a cutout in a user's worktable, or Headway can supply a completely packaged stand-alone system. When automated dispensers and other accessories are used, it is highly recommended that a complete turnkey package be purchased from Headway. For basic spinners without accessories, an optional portable stand for the motor package is also available.

The New PWM32 Spinners are Available in Four Standard Motor/Bowl Configurations

• Model PWM32-PS-R790, up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks, etc. and substrates up to 5-inch maximum
• Model PWM32-PS-CB15, up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks, etc. and substrates up to a recommended 8-inch maximum
• Model PWM32-BD-CB15, up to 2,500 rpm for heavy loads such as compact disk masters, thick E-beam masks, LCD panels, substrates requiring high inertia chucks, etc. and substrates up to a recommended 12-inch maximum
• Model PWM32-BD-LS22, the next larger bowl for substrates larger than 12-inches, or for heavy substrates at higher than 2,500 rpm or consider the IT22 (a different family of 22-inch I.D. Spinners).

For larger than 12-inch substrates, or for heavy substrates at higher than 2,500 rpm, HRI recommends the next larger bowl, the LS22 or IT22 (a different family of 22-inch I.D. Spinners).

PWM32 Controlled spinner systems are available in four Motor/Bowl configurations listed below. Each spinner system is manufactured to HRI's standard specifications. The following information will assist in selecting the most efficient components for your needs.

The PWM32 Spinner Four Standard Motor/Bowl Configurations:

• Model PWM32-PS-R790, up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks, etc. and substrates up to 5-inch maximum.
• Model PWM32-PS-CB15, up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks, etc. and substrates up to a recommended 8-inch maximum.
• Model PWM32-BD-CB15, up to 2,500 rpm for heavy loads such as compact disk masters, thick E-beam masks, LCD panels, substrates requiring high inertia chucks, etc. and substrates up to a recommended 12-inch maximum.
• Model PWM32-BD-LS22, the next larger bowl for substrates larger than 12-inches, or for heavy substrates at higher than 2,500 rpm or consider the IT22 (a different family of 22-inch I.D. Spinners).

• World-wide line voltage input: 115/220 vac 50/60Hz models
• Pulse Width Modulated (PWM) motor drive
  • The PWM32 controller drives various DC servo motors with closed loop feedback
    • Headway EC and PM motors (on earlier SCR spinners)
    • Headway PS motor (EC101DT spinners)
    • The high powered BD motor, to 2,500 rpm for heavy loads
    • Almost certainly others, not yet tested
• Safety Features
  • Failsafe interlocked vacuum to the chuck. Vacuum is applied by de-energizing the control valve. If power fails during a process, the vacuum remains applied. Cycle can not start without chuck vacuum and will abort if vacuum is lost while running.
  • Zero speed sensor: Keeps vacuum fully applied to the chuck until the motor stops. Can also be used to lock doors, lids, etc., during operation, or prevent the accessory substrate lifter from working during spinner operation.
  • Abort circuit permits manual operator or system automatic abort.
  • Inhibit start circuit allows various optional accessories to prevent the start of a new cycle until an undesired condition is corrected. For instance, if a sensor on a waste container senses a "near full" condition, or if a sensor in the exhaust tube senses an out-of-tolerance exhaust condition, the sensor can inhibit the beginning of a new cycle without aborting the current cycle in progress.

PWM32 Controller

• PWM32 Microprocessor Sequence Controller
  • Up to 9 steps in one recipe
  • Memory for up to 10 user-designed recipes
  • User-set in each step: rpm, ramp (accel/decel), time, various I/O for accessory control (dispensers, exhaust control, lid/doors, etc.
  • Speed can be manually adjusted while a recipe is running
  • Operator can manually turn on the vacuum to the chuck, overriding AUTO control
  • LCD interface for user input prompting and process display
  • RS485 port for future communication and add-on equipment use
  • An optional accessory stand is available for the controller. It permits the controller to sit on a tabletop surface, inclined upward toward the operator. It may also alternately be used to suspend the controller underneath a tabletop, inclined upward toward the operator.
  • The basic controller can control simple dispensers at minimal cost for additional dispenser hardware. Controller I/O allows output of 2 fluids.
  • The PWM 32 controller can directly replace many older SCR type controllers (EC101 and PM101) for improved PWM performance, as well as the other new features. A trade-in credit will be given on applicable EC/PM101 spinners or controllers. Typically, dispensers used on EC/PM101 spinners will not work with the PWM32 control. It may be possible at the factory to adapt such dispensers, or to use applicable parts in building a compatible dispenser.

Backside View of PWM32	Optional Tabletop Mounting Stand