Silicon Wafer dicing SAW

 

Quality Manufacturer of High Precision Diamond Dicing Blades and Dicing Saws Committed to Customer Service Excellence

Since 1978, Thermocarbon has closely worked with its customers to solve a wide variety of dicing application problems ranging from providing the user with the optimum cutting parameters for all types of difficult materials, to recommending proper mounting and handling procedures.

Our professional sales staff are constantly continuing their training within the dicing application processes so that they may better assist our customers striving to increase yield and productivity. If Thermocarbon does not have an immediate answer, we will offer you complete R&D services in our dicing lab to work toward a solution. There is never a charge for this service to you, the customer.
Wafer Dicing Diamond Blades

Blademaster® and Dicemaster® Diamond Dicing Blades

Our product line includes the distinctive Blademaster® and Dicemaster® diamond dicing blades, which are used and favored throughout the world in wafer dicing applications because of their precision tolerances, self-sharpening characteristics, and consistent reliability.

The Dicemaster® resin-bonded universal
wafer dicing blade represents state-of-the-art precision in ultra thin diamond grinding wheels. It is designed to:
  • chip less
  • run cooler
  • last longer
  • cut with closer tolerances than any other blade on the market
Wafer Dicing Saw - Tcar 864-1, Wafer dicing SAW,  ̼̽
Des. 381,668 & 387,364

Tcar® 864-1 Unparalleled Flexibility

Wafer Dicing Saw Flexibility
 

.050" Thick Silicon
Cut in symmetry to center artwork utilizing the patented "Wafer Zero" of the
Tcar 864-1 Programmable Dicing Saw manufactured by Thermocarbon Inc.
Overall cut diameter: 3.54"
Process Time: 16 Minutes

Tcar® 864-1 Wafer Dicing Saw

The Tcar® 864-1 programmable dicing saw marks a new era in wafer dicing technology. Designed and manufactured in the United States by the industry leader in diamond grinding wheels, the Tcar® 864-1 offers:
  • exceptional power
  • accuracy
  • infinite programming flexibility
  • made in the USA
Our supportive product line includes:
  • blades
  • flanges
  • spacers
  • dresser plates
  • lapping systems

Call today for your free Thermocarbon Product and Diamond Grinding Technology Millennium Handbook. (Updated 11/01/01) Valuable source book for the "How To" of selecting dicing equipment and blades, actual "Case Histories" covering difficult dicing applications, as well as everything you need for ordering diamond dicing blades, flanges, adapters, and equipment.

Wafer Dicing Excellence

Whether wafer dicing thin silicon materials or cutting into heavy cross sections of hard brittle materials, such as ceramic and sapphire. Thermocarbon's wafer dicing saw and diamond grinding wheels provide dicing and diamond grinding excellence for all types of materials and applications including:

Thermocarbon backs all of its products with a complete customer support program designed to assure the maximum return on your investment. This support includes 24-hour open communications, free consultation, custom design services, sample blades, and free R&D services.

Contact us for more information about our diamond dicing blades, wafer dicing saws, and accessories.

 

TEL : 02-868-0661 ()                                     FAX : 02-868-0664

 

 

Tcar® 864-1 Wafer Dicing Saw
A Complete Turnkey System

· Tcar® 864-1 Complete Solution · Tcar® 864-1 Features
· Tcar® 864-1 Technical Specifications · Tcar® 864-1 Dicing Laws


Controls

Literally at your fingertips, the Tcar® 864-1 wafer dicing saw takes into account the ergonomics required for efficient operation. Controls include keyboard, push buttons, joysticks, and track ball. The full-color dual monitors provide complete separation of text and video, which permits all-critical parameters to be viewed at a glance. All this combined with critical control redundancy at the monitor screen and on-line, real-time graphics display provides the Tcar® 864-1 wafer dicing saw with unsurpassed operational flexibility.

Tcar864-1 wafer dicing saw Power and logic lockable pullout drawers facilitate easy and safe maintenance. Electronic compartments are physically isolated from all oil and water flow components via a drip pan that runs corner-to-corner between the lower and upper sections of the cabinet.

Smaller footprint

The Tcar® 864-1 cabinet design meets the need for reduced space requirements on the manufacturing floor without giving up accessibility for ease of maintenance. In fact, because no side access is required for maintenance, multiple units may be installed side by side, thus using as little as two-thirds the floor space of competitive units! And the removable control panel allows the Tcar® 864-1 wafer dicing saw to pass through a standard office door. Units are leveled in place using four leveling feet, which are all accessible from the front of the saw.



Wafer dicing SAW,  ̼̽ Infinite chuck rotation¹ and programming steps in addition to a four-inch "Z" travel allows for any dicing geometry. Patent-pending chuck brake system ensures solid locking of positions for high accuracy.

Possessing an excellent tactile feel, the rugged keyboard, sealed to NEMA 4, will stand up to the harshest of dicing environments. Tcar864-1 wafer dicing saw

Tcar864-1 wafer dicing saw Optics, spindle, blade, and wash bar coolant flow, as well as vacuum and air pressure, visible at a glance.

 

 

Tcar® 864-1 Wafer Dicing Saw
Standard Features

· Tcar® 864-1 Complete Solution · Tcar® 864-1 Features
· Tcar® 864-1 Technical Specifications · Tcar® 864-1 Dicing Laws


"Standard" Features means just that - no additional costs! Where options are given, simply choose which system best suits your needs for installation on your Tcar® 864-1 wafer dicing saw.

  • Cast iron axis construction mounted on solid Granite Block for rigidity and stability.

  • Unique X, Y, Z, and Theta Double Closed Loop control.

  • Unlimited Theta rotation and large four-inch "Z" travel.

  • Powerful three horsepower variable-speed spindle.

  • Two full color high-resolution monitors.

  • Real time graphics display.

  • Powerful integrated PC-based program introduces patents-pending features such as:
o Flange Clearance Stop® ¹ - a patented program that prevents the collision of the blade adapter's periphery with the top surface of the workpiece during the dicing operation.

o Wafer Zero® ² - Patent pending Wafer Zero® automatically transfers the home position from the chuck to the wafer center where it is needed, eliminating a very time-consuming and difficult process.

o Align Offset® ³ - Patent pending "Align Offset®" (Align here/cut there) allows alignments to be made on any portion of the wafer's artwork without having to actually make a cut there. The first cut is made a specified distance from the alignment location.
Tcar864-1 dicing saw SmartGraph
The Tcar® 864-1's pop-up SmartGrafix® window simplifies creating complex shapes such as the circular optical filter shown above.

Wafer dicing with Tcar864-1 dicing saws
The round optical filter above was diced from a rectangular glass substrate using the diverse flexibility of the Tcar® 864-1.
  • Five sensors to protect your investment: spindle air, coolant, temperature, blade coolant, and chuck vacuum.

  • Conductive or non-conductive dicing blades.

  • Front panel, coolant trough, and chuck pan, made of stainless steel and powder-coated to withstand years of continuous operation.
The Tcar® 864-1 wafer dicing saw offers exceptional power, accuracy, and infinite programming flexibility in a complete turnkey solution. In addition, it adheres to the three basic laws of wafer dicing hard and brittle material.


Dicing Glass with Tcar864-1 dicing saws
This intricate glass geometric shape, with its .065" stair width, requires a multiplicity of rotation, depth, and step-over commands. Using a single .015" thick Dicemaster® blade for the entire operation, the Tcar® 864-1 was programmed and the start button pressed.

 

TEL : 02-868-0661 () 

Tcar 864-1 Technical Specifications

· Tcar® 864-1 Complete Solution · Tcar® 864-1 Features
· Tcar® 864-1 Technical Specifications · Tcar® 864-1 Dicing Laws


Accuracy: The maximum difference allowed between the position of the servo and the position of the spindle nose, externally measured over full travel with a laser interferometer at 24° C.

Repeatability: Specified over full travel, as the standard deviation, calculated from differences recorded for 10 identical displacements to the same position.

Cutting Axis X
Closed loop positioning system Brushless DC servo
Drive system 2 mm/rev lead screw with anti-backlash
Maximum travel 295 mm 11.6 inches
Minimum speed 0.050 mm/sec 0.002 in/sec
Maximum speed 130 mm/sec 5.1 in/sec
Resolution 0.25 micron 0.00001 inch

Index Axis Y
Closed loop positioning system Brushless DC servo with linear optical encoder
Drive system 1 mm/rev lead screw with anti-backlash
Maximum travel 157 mm 6.2 inches
Resolution, linear encoder 0.50 micron 0.00002 inch
Repeatability 1.5 micron 0.00006 inch
Accuracy 3 micron 0.00012 inch

Vertical Axis Z
Closed loop positioning system Brushless DC servo with linear optical encoder
Drive system 1 mm/rev ball screw with anti-backlash
Maximum travel 95 mm 3.7 inches
Resolution, linear encoder 0.50 micron 0.00002 inch
Repeatability 1.5 micron 0.00006 inch
Accuracy 3 micron 0.00012 inch
Height sense repeatability 1.5 micron 0.00006 inch

Rotary Axis Theta
Closed loop positioning system Brushless DC servo with high resolution internal rotary optical encoder
Drive system 100:1 anti-backlash worm drive
Chuck brake Air lock system
Rotation (infinite) 360 degrees
Resolution, rotary encoder .0010 degrees 3.6 arc-seconds

Chuck
Cross hatched (vacuum) 152.4 mm 6 inch
Porous stone (vacuum) 152.4 mm 6 inch
Other standard configurations available

Spindle
Minimum blade diameter 48.2 mm 1.9 inch
Maximum blade diameter 76.2 mm 3.0 inch
Type Titanium housing, air bearing, water cooled, infinite variable speed
Minimum speed 1,000 rpm
Maximum speed 30,000 rpm
Maximum power output 2,250 watts 3 horsepower

Optics
Dual high resolution color monitors 355.6 mm 14 inch
Camera CCD, S-Video
Typical magnification 150x
Targeting system Split-field, electronic cross hair
Typical resolution 3 microns/line .00012 inch/line

Utilities
Electrical 208 VAC-240VAC single phase, 20A
Air (spindle) 80 psi, dewpoint 45 degrees @ 100 psi
Water 40 psi to 100 psi
Vacuum 24 in. Hg, continuous

Dimensions
Height 163 cm 64 inches
Width 119 cm 47 inches
Depth 105 cm 41 inches
Weight 602 Kg 1325 lbs

Note: All specifications subject to modification without notice

 

TEL : 02-868-0661 () 

 

How the Tcar® 864-1 Wafer Dicing Saw Adheres to
The Three Basic Laws for Wafer Dicing
Hard and Brittle Materials

· Tcar® 864-1 Complete Solution · Tcar® 864-1 Features
· Tcar® 864-1 Technical Specifications · Tcar® 864-1 Dicing Laws


To be successful in dicing hard and brittle materials, the fundamental requirements of rigidity, power, and cooling must be considered for each system component selection. You also need to understand that each component of the sawing process cannot create sawing efficiency alone. Each component that makes up your interactive system must be compatible. If just one component is wrong, it could render all other properly selected components ineffective.

Rigidity

System rigidity plays a major role in sawing efficiency and quality, whether dicing thin silicon materials at inch-per-second feed rates, or cutting into heavy cross sections of ceramic-based materials.
wafer dicing tutorials-wafer dicing hard and brittle materials

A rigidly mounted spindle with virtually no end play or vibration is mandatory for dicing and diamond grinding. Additionally, to maintain the perpendicularity of the spindle to the X slide is essential for the diamond blade to run true throughout subsequent operations.

The Tcar® 864-1 wafer dicing saw is exceptionally solid in its foundation. X, Y, Z, and Theta are constructed of stable cast iron, mounted on a solid granite base and cradled into an all-steel independent frame cabinet.

Utilizing the latest technology in high precision and frictionless linear guide ways, each axis is driven using powerful DC Servo motors to ensure smooth and accurate motion in every direction.

All this, combined with Heidenhain optical encoders and the most sophisticated closed-loop feedback circuit ever designed, takes precision wafer dicing to a whole new level.

Power

Packing the most powerful air bearing spindle for its size, the Tcar® 864-1 wafer dicing saw delivers a full three horsepower at 30,000 RPM. The spindle is completely enclosed in a corrosion-resistant titanium housing and has an invar shaft to reduce the coefficient of thermal expansion for improved stability at the cutting edge.

The frequency inverter, utilizing 100% digital architecture, provides for variable speeds ranging from 1,000 to 30,000 RPM and maintains constant torque during acceleration. The circuit's extremely fast response time eliminates damaging power loss during the actual cutting process when dicing your most demanding applications.

Cooling

Effective cooling of the diamond blade at the point of contact with the material being processed is essential for any diamond cutting and grinding application. Yet, cooling is one of the more overlooked conditions in the system.

Dual nozzles provide two separate streams of coolant to the cutting interface, and at an angle to the cutting edge of the blade, so that each stream will favor one side of the diamond blade after providing the necessary coolant to the leading edge. This approach provides the necessary coolant to all of the critical areas of the cutting blade, with no loss of the directional flow required for removing the debris generated during cutting.

The Tcar® 864-1 diamond blade housing incorporates efficient dual-nozzle cooling jets that are easily adjustable in every direction to accommodate all dicing applications, no matter how thick the material is to be processed. Front-mounted flow meters facilitate easy adjustment and consistency of coolant velocities.

The Tcar® 864-1 wafer dicing saw offers exceptional power, accuracy, and infinite programming flexibility in a complete turnkey solution.

 

 

TEL : 02-868-0661 () 

 

 

Flanges and Spacers

While most end users will take considerable steps in assuring the rigidity of the machine they purchase, they may overlook the critical mounting requirements, such as the flanges and spacers, necessary for the diamond blade. No matter how well the diamond blade was manufactured to run true, it can only run as accurately as the surfaces it comes into contact with. The bearing surfaces of the flanges or spacers must be flat, clean, and parallel.
 
Blade Adapters
Thermocarbon offers a wide range of standard blade flanges and spacers to fit all dicing saws and conventional sawing equipment. Our flanges and spacers conform to exacting specifications to ensure that you get the highest performance from your diamond blades.

Our Flanges and Spacers Are Designed for Longer Blade Life

The most frequent cause of blade breakage and oversize cut widths with relation to blade thickness is improper flange torque or poor flange quality. Thermocarbon's precision dicing blade flanges and spacers are constructed of the highest quality stainless steel and are also available in other materials upon request. They are machined in our own modern tool manufacturing facility to exact specifications that ensure parallelism, proper blade exposure, balance, and precise bearing surfaces. Our demanding specifications ensure:

Flanges for precision dicing
  • even cut quality
  • minimal edge chipping and kerf
  • high dicing blade life and free cutting performance.

Maintenance and Repair for all Flanges and Spacers

Thermocarbon provides maintenance and repair for all dicing blade flanges and spacers in order to support your efforts in achieving consistent high quality standards for your wafer cutting and dicing operations.

Metal Dicing Blade Spacer

Thermocarbon also offers as a stock item the MBS-063 Metal Dicing Blade Spacer for use on desktop dicing saws using both the resinoid and metal bonded type dicing blades. The MBS-063 eliminates the need to readjust dicing blade coolant nozzles and scope positions when alternating between the two types of dicing blades.

 

 

 

Quality Diamond Dicing Blades for Dicing and
Precision Cutting

Thermocarbon's widely used Dicemaster® and Blademaster® diamond dicing blades have been consistently favored worldwide for their:

Resin-bonded Diamond Dicing Blades

Dicemaster® resin-bonded universal diamond dicing blades are state-of-the-art in diamond grinding technology. Dicemaster diamond blades are designed to:
  • chip less
  • run cooler
  • last longer
  • cut with closer tolerances than any other dicing blade on the market.
cut-off saw diamond dicing blades

Highest Quality Abrasives

Dicemaster® and Blademaster® diamond dicing blades are composed of the highest quality diamond abrasives. These diamonds are evenly dispersed to ensure the highest quality cuts from start to finish, even in the most difficult materials. An almost infinite variety of diamond/filler combinations are available to create the wide range of performance capabilities necessary to accommodate your various application requirements.

Self-Sharpening

Your technicians will appreciate Dicemaster's remarkable self-sharpening characteristics, which eliminate the need for dressing procedures and costly interruptions to production.

High Yields

Thermocarbon's unequaled production and quality control standards ensure that you will receive consistent performance from diamond blade to diamond blade. The result is higher yields, faster feed rates, and increased productivity.

Personalized Service

diamond dicing blades In order to specifically address your individual needs, our experienced staff will help you to choose from among our various cut-off saw diamond dicing blades. Dicemaster® and Blademaster® high-quality diamond blades are available in a complete range of diameters from 2" through 4.6" to fit all dicing saws and conventional grinders. Thicknesses are available from .0015" through .2500" with various tolerance levels starting at + .0001". All blades are electrically conductive unless otherwise stated.

Specialty Configurations

In addition to a complete line of standard diamond blades, Thermocarbon offers specialty configurations, diameters, and thicknesses to meet your most demanding requirements. Our Research & Development lab, which is one of the most sophisticated in the country, will custom formulate the dicing blade matrix to best meet your most demanding requirements.

 

 

Quality Diamond Dicing Blades for Dicing and
Precision Cutting

Thermocarbon's widely used Dicemaster® and Blademaster® diamond dicing blades have been consistently favored worldwide for their:

Resin-bonded Diamond Dicing Blades

Dicemaster® resin-bonded universal diamond dicing blades are state-of-the-art in diamond grinding technology. Dicemaster diamond blades are designed to:
  • chip less
  • run cooler
  • last longer
  • cut with closer tolerances than any other dicing blade on the market.
cut-off saw diamond dicing blades

Highest Quality Abrasives

Dicemaster® and Blademaster® diamond dicing blades are composed of the highest quality diamond abrasives. These diamonds are evenly dispersed to ensure the highest quality cuts from start to finish, even in the most difficult materials. An almost infinite variety of diamond/filler combinations are available to create the wide range of performance capabilities necessary to accommodate your various application requirements.

Self-Sharpening

Your technicians will appreciate Dicemaster's remarkable self-sharpening characteristics, which eliminate the need for dressing procedures and costly interruptions to production.

High Yields

Thermocarbon's unequaled production and quality control standards ensure that you will receive consistent performance from diamond blade to diamond blade. The result is higher yields, faster feed rates, and increased productivity.

Personalized Service

diamond dicing blades In order to specifically address your individual needs, our experienced staff will help you to choose from among our various cut-off saw diamond dicing blades. Dicemaster® and Blademaster® high-quality diamond blades are available in a complete range of diameters from 2" through 4.6" to fit all dicing saws and conventional grinders. Thicknesses are available from .0015" through .2500" with various tolerance levels starting at + .0001". All blades are electrically conductive unless otherwise stated.

Specialty Configurations

In addition to a complete line of standard diamond blades, Thermocarbon offers specialty configurations, diameters, and thicknesses to meet your most demanding requirements. Our Research & Development lab, which is one of the most sophisticated in the country, will custom formulate the dicing blade matrix to best meet your most demanding requirements.

 

 

 

Thermocarbon Ordering Information for
Diamond Dicing Blades

Please use the following configuration sheets to determine the correct diamond dicing blades for your dicing application. Thermocarbon's service engineers are also available to assist you in the selection of the blade best suited for your application.

Diamond Dicing Blades

2" O.D. x 1" I.D.
2.050", 2.187", & 2.25" Diameter Series
3" O.D. x 1.575" I.D.
3" O.D. x 2" I.D.
4.6" O.D. x 3.5" I.D.
4", 4.3", & 4.5" Diameter Series
Resin-Bonded Diamond Dicing Blade Matrices

 

 

ǰܿ ũ ̳ , ɿĵ پ ݵü , մϴ. մϴ.

 

 

 

TEL : 02-868-0661 ()                                     FAX : 02-868-0664

 

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